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Syllabus

Course Number 0512-4702-02
Course Name Introduction to Micro-Electro-Mechanical Systems
Academic Unit The Iby and Aladar Fleischman Faculty of Engineering -
Electrical Engineering
Mode of Instruction Exercise
Credit Hours 1
Semester 2021/2
Day Mon
Hours 15:00-16:00
Building Wolfson - Mechanical Engineer
Room 406
Course is taught in English
Syllabus Not Found

Short Course Description

Principles of microelectro-mechanical sensing and operation: acoustic transducers, thermometers (piezoelectric materials, diffusers), chemists. Micro-sensors and actuators for acceleration, pressure, optical, and biological applications, including micro-channels, pumps, and valves.
Operation and fabrication principles in the field of micro-electro-mechanical systems: materials in miniaturization technologies (silicon, glass, plastic, PDMS), lithography methods (optical, Ebeam, soft-lithography), evaporation and etching methods (dry and chemical), three-dimensional structure production processes, Modification and characterization of surface properties.



Full Syllabus
Course Requirements

Students may be required to submit additional assignments
Full requirements as stated in full syllabus

PrerequisiteIntro. to Semic (05122507) ORQuantum and Solid State P (05122830)

The specific prerequisites of the course,
according to the study program, appears on the program page of the handbook



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